Semiconductor manufacturers are striving for high productivity rates. The overall system effectiveness (OSE), which can be increased with solutions from igus, is correspondingly important. Our energy supply systems and cables for cleanroom applications support high manufacturing quality because they are made of high-performance polymers that are abrasion-resistant and have low gas release. They are compact, low-maintenance, easy to install and cost-effective. In addition, it has a modular design so that plant operators can make extensions at any time. Our products, which increase OSE in the semiconductor industry worldwide, are used in machines and systems for laser marking, EUV lithography and automatic optical inspection (AOI), among others.
► Cleanroom compatible according to IPA ISO Class 1
► Modular and compact structure
► Replace cables in minutes
► With co-ordinated CFCLEAN stranded structure for high dependability
► Available from stock
► No minimum order quantity
An e-skin flat SKF12.4.03.01.1 as a 4-fold layer together with PVC & TPE cables from igus ensures the reliable energy supply of an air bearing linear system.
E6 and E14 series energy chains are used in the production of the Fixload semiconductor automation system. For the sensitive application area of the load interface for 300mm wafer processing equipment, clean air is required. The e-chains meet the requirements: they are wear-resistant and suitable for cleanrooms of IPA ISO class 2 and 3.
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