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drylin® cleanroom compatibility, ESD compatibility and RoHS

Fraunhofer tested device

The tested drylin® guides demonstrate a clear suitability for cleanrooms. The differentiation between the various cleanroom classes is only dependent on load and speed of the application. The combination iglidur® J against anodised and hard anodised aluminium has "Level 1" in the ESD compatibility according to SEMI E78-0998 (best rating).
 
All drylin® linear guide systems are designed for dry operation and have also been tested in this condition. No oils or fats were used as additional lubricants.

The following drylin® guides from igus® were tested: N40, W10, T25 and T30.

NK-02-40-02 drylin® linear guide system

"For the linear guide system drylin® NK-02-40-02 by igus® GmbH, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2μm, 0.3μm, 0.5μm, and 5μm with motion speed of v =1m/s, to clearly derive suitability for cleanrooms classified as ISO Class 6 according to DIN EN ISO 14644-1." "
The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system drylin® NK-02-40-02 can be classified as "level 1" (highest rank). Fraunhofer IPA Report No.: IG 0308- 295 73

drylin® TK-01-30-01 linear guide system

"For the linear guide system drylin® TK-01-30-01 by igus® GmbH, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2μm, 0.3μm, 0.5μm and 5μm with motion speed of v = 0.1m/s, to clearly derive suitability for cleanrooms classified as ISO Class 3 according to DIN EN ISO 14644-1." “

drylin® TK-01-25-02 linear guide system

"For the linear guide system drylin® TK-01-25-02 by igus® GmbH, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2μm, 0.3μm, 0.5μm and 5μm with motion speed of v = 1m/s, to clearly derive suitability for cleanrooms classified as ISO Class 5 according to DIN EN ISO 14644-1." "
The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system drylin® TK-01-25-02 can be classified as "level 1" (highest rank).

WK-10-40-15-01 drylin® linear guide system

"For the linear guide system drylin® WK-10-40-15-01 by igus® GmbH, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2μm, 0.3μm, 0.5μm and 5μm with motion speed of v = 1m/s, to clearly derive suitability for cleanrooms classified as ISO Class 6 according to DIN EN ISO 14644-1." "
The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system drylin® WK-10-40-15-01 can be classified as "level 1" (highest rank). See Fraunhofer IPA Report No.: IG 0308-295 74

drylin® NK-02-40-02

Particle abrasion measurement

drylin® TK-01-25-02

Particle abrasion measurement

drylin WK-10-40-15-01

Particle abrasion measurement

Further information